TY - CHAP U1 - Konferenzveröffentlichung A1 - Rogall, Olga A1 - Feil, Niclas M. A1 - Ding, Anli A1 - Mayer, Elena A1 - Pupyrev, Pavel Dmitrievich A1 - Lomonosov, Alexey M. A1 - Žukauskaitė, Agnė A1 - Ambacher, Oliver A1 - Mayer, Andreas T1 - Determining Elastic Constants of AlScN Films on Silicon Substrates by Laser Ultrasonics T2 - 2020 Symposium Proceedings N2 - Laser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the measurements. Results for their dependence on the Sc content are presented and compared to corresponding data in the literature, obtained by alternative experimental methods or by ab-initio calculations. Y1 - 2020 SN - 1948-5727 (digital) SS - 1948-5727 (digital) SN - 1948-5719 (Print on Demand) SS - 1948-5719 (Print on Demand) SN - 978-1-7281-5448-0 (digital) SB - 978-1-7281-5448-0 (digital) SN - 978-1-7281-5449-7 (Print on Demand) SB - 978-1-7281-5449-7 (Print on Demand) U6 - https://doi.org/10.1109/IUS46767.2020.9251632 DO - https://doi.org/10.1109/IUS46767.2020.9251632 SP - 4 S1 - 4 ER -