TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Neuper, Felix
A1  - Cadilha Marques, Gabriel
A1  - Singaraju, Surya Abhishek
A1  - Kruk, Robert
A1  - Aghassi-Hagmann, Jasmin
A1  - Hahn, Horst
A1  - Breitung, Ben
T1  - ALD-Derived, Low-Density Alumina as Solid Electrolyte in Printed Low-Voltage FETs
JF  - IEEE Transactions on Electron Devices
N2  - In this report, we have studied field-effect transistors (FETs) using low-density alumina for electrolytic gating. Device layers have been prepared starting from the structured ITO glasses by printing the In 2 O 3 channels, low-temperature atomic layer deposition (ALD) of alumina (Al 2 O 3 ), and printing graphene top gates. The transistor performance could be deliberately changed by alternating the ambient humidity; furthermore, ID,ON/ID,OFF-ratios of up to seven orders of magnitude and threshold voltages between 0.66 and 0.43 V, decreasing with an increasing relative humidity between 40% and 90%, could be achieved. In contrast to the common usage of Al 2 O 3 as the dielectric in the FETs, our devices show electrolyte-typegating behavior. This is a result from the formation of protons on the Al 2 O 3 surfaces at higher humidities. Due to the very high local capacitances of the Helmholtz double layers at the channel surfaces, the operation voltage can be as low as 1 V. At low humidities (≤30%), the solid electrolyte dries out and the performance breaks down; however, it can fully reversibly be regained upon a humidity increase. Using ALD-derived alumina as solid electrolyte gating material, thus, allows low-voltage operation and provides a chemically stable gating material while maintaining low process temperatures. However, it has proven to be highly humidity-dependent in its performance.
Y1  - 2020
SN  - 0018-9383 (Print)
SS  - 0018-9383 (Print)
SN  - 0096-2430 (Online)
SS  - 0096-2430 (Online)
U6  - https://doi.org/10.1109/TED.2020.3005624
DO  - https://doi.org/10.1109/TED.2020.3005624
VL  - 67
IS  - 9
SP  - 3828
EP  - 3833
ER  -