TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Garlapati, Suresh Kumar
A1  - Cadilha Marques, Gabriel
A1  - Gebauer, Julia Susanne
A1  - Dehm, Simone
A1  - Bruns, Michael
A1  - Winterer, Markus
A1  - Tahoori, Mehdi Baradaran
A1  - Aghassi-Hagmann, Jasmin
A1  - Hahn, Horst
A1  - Dasgupta, Subho
T1  - High performance printed oxide field-effect transistors processed using photonic curing
JF  - Nanotechnology
N2  - Oxide semiconductors are highly promising candidates for the most awaited, next-generation electronics, namely, printed electronics. As a fabrication route for the solution-processed/printed oxide semiconductors, photonic curing is becoming increasingly popular, as compared to the conventional thermal curing method; the former offers numerous advantages over the latter, such as low process temperatures and short exposure time and thereby, high throughput compatibility. Here, using dissimilar photonic curing concepts (UV–visible light and UV-laser), we demonstrate facile fabrication of high performance In2O3 field-effect transistors (FETs). Beside the processing related issues (temperature, time etc.), the other known limitation of oxide electronics is the lack of high performance p-type semiconductors, which can be bypassed using unipolar logics from high mobility n-type semiconductors alone. Interestingly, here we have found that our chosen distinct photonic curing methods can offer a large variation in threshold voltage, when they are fabricated from the same precursor ink. Consequently, both depletion and enhancement-mode devices have been achieved which can be used as the pull-up and pull-down transistors in unipolar inverters. The present device fabrication recipe demonstrates fast processing of low operation voltage, high performance FETs with large threshold voltage tunability.
Y1  - 2018
SN  - 0957-4484
SS  - 0957-4484
U6  - https://doi.org/10.1088/1361-6528/aab7a2
DO  - https://doi.org/10.1088/1361-6528/aab7a2
PM  - 29553481
VL  - 29
IS  - 23
SP  - 235205
S1  - 7
CY  - Bristol
ER  -