@article{KnappLomonosovWarkentinetal.2015, author = {Matthias Knapp and Alexey M. Lomonosov and Paul Warkentin and Philipp M. J{\"a}ger and Werner Ruile and Hans-Peter Kirschner and Matthias Honal and Ingo Bleyl and Andreas Mayer and Leonhard Michael Reindl}, title = {Accurate characterization of SiO2 thin films using surface acoustic waves}, series = {IEEE transactions on ultrasonics, ferroelectrics, and frequency control}, volume = {62}, issn = {1525-8955}, doi = {10.1109/TUFFC.2014.006921}, pages = {736 -- 743}, year = {2015}, language = {en} }