TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Knapp, Matthias A1 - Lomonosov, Alexey M. A1 - Warkentin, Paul A1 - Jäger, Philipp M. A1 - Ruile, Werner A1 - Kirschner, Hans-Peter A1 - Honal, Matthias A1 - Bleyl, Ingo A1 - Mayer, Andreas A1 - Reindl, Leonhard Michael T1 - Accurate characterization of SiO2 thin films using surface acoustic waves JF - IEEE transactions on ultrasonics, ferroelectrics, and frequency control KW - Akustik KW - Schallwelle Y1 - 2015 SN - 1525-8955 SS - 1525-8955 U6 - https://doi.org/10.1109/TUFFC.2014.006921 DO - https://doi.org/10.1109/TUFFC.2014.006921 PM - 25881351 VL - 62 SP - 736 EP - 743 ER -