TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Chauhan, Vikrant A1 - Mayer, Markus A1 - Mayer, Elena A1 - Ruile, Werner A1 - Ebner, Thomas A1 - Bleyl, Ingo A1 - Wagner, Karl A1 - Weigel, Robert A1 - Mayer, Andreas A1 - Hagelauer, Amelie T1 - Investigation on Third-Order Intermodulation Distortions due to Material Nonlinearities in TC-SAW Devices JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control N2 - Nonlinearity can give rise to intermodulation distortions in surface acoustic wave (SAW) devices operating at high input power levels. To understand such undesired effects, a finite element method (FEM) simulation model in combination with a perturbation theory is applied to find out the role of different materials and higher order nonlinear tensor data for the nonlinearities in such acoustic devices. At high power, the SAW devices containing metal, piezoelectric substrate, and temperature compensating (TC) layers are subject to complicated geometrical, material, and other nonlinearities. In this paper, third-order nonlinearities in TC-SAW devices are investigated. The materials used are LiNbO 3 -rot128YX as the substrate and copper electrodes covered with a SiO 2 film as the TC layer. An effective nonlinearity constant for a given system is determined by comparison of nonlinear P-matrix simulations to third-order intermodulation measurements of test filters in a first step. By employing these constants from different systems, i.e., different metallization ratios, in nonlinear periodic P-matrix simulations, a direct comparison to nonlinear periodic FEM-simulations yields scaling factors for the materials used. Thus, the contribution of the different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of metal electrodes, substrate, and TC film are discussed in detail. Y1 - 2018 UR - https://www.researchgate.net/publication/324903089 SN - 0885-3010 SS - 0885-3010 U6 - https://doi.org/10.1109/TUFFC.2018.2832283 DO - https://doi.org/10.1109/TUFFC.2018.2832283 VL - 65 IS - 10 SP - 1914 EP - 1924 ER -