@article{KnappLomonosovWarkentinetal., author = {Knapp, Matthias and Lomonosov, Alexey M. and Warkentin, Paul and J{\"a}ger, Philipp M. and Ruile, Werner and Kirschner, Hans-Peter and Honal, Matthias and Bleyl, Ingo and Mayer, Andreas and Reindl, Leonhard Michael}, title = {Accurate characterization of SiO2 thin films using surface acoustic waves}, series = {IEEE transactions on ultrasonics, ferroelectrics, and frequency control}, volume = {62}, issn = {1525-8955}, doi = {10.1109/TUFFC.2014.006921}, pages = {736 -- 743}, language = {en} }