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Laser Ultrasound Investigations of AlScN(0001) and AlScN(11-20) Thin Films Prepared by Magnetron Sputter Epitaxy on Sapphire Substrates

  • The laser ultrasound (LU) technique has been used to determine dispersion curves for surface acoustic waves (SAW) propagating in AlScN/Al2O3 systems. Polar and non-polar Al0.77Sc0.23N thin films were prepared by magnetron sputter epitaxy on Al2O3 substrates and coated with a metal layer. SAW dispersion curves have been measured for various propagation directions on the surface. This is easilyThe laser ultrasound (LU) technique has been used to determine dispersion curves for surface acoustic waves (SAW) propagating in AlScN/Al2O3 systems. Polar and non-polar Al0.77Sc0.23N thin films were prepared by magnetron sputter epitaxy on Al2O3 substrates and coated with a metal layer. SAW dispersion curves have been measured for various propagation directions on the surface. This is easily achieved in LU measurements since no additional surface structures need to be fabricated, which would be required if elastic properties are determined with the help of SAW resonators. Variation of the propagation direction allows for efficient use of the system’s anisotropy when extracting information on elastic properties. This helps to overcome the complexity caused by a large number of elastic constants in the film material. An analysis of the sensitivity of the SAW phase velocities (with respect to the elastic moduli and their dependence on SAW propagation direction) reveals that the non-polar AlScN films are particularly well suited for the extraction of elastic film properties. Good agreement is found between experiment and theoretical predictions, validating LU as a non-destructive and fast technique for the determination of elastic constants of piezoelectric thin films.show moreshow less

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Metadaten
Document Type:Article (reviewed)
Title (English):Laser Ultrasound Investigations of AlScN(0001) and AlScN(11-20) Thin Films Prepared by Magnetron Sputter Epitaxy on Sapphire Substrates
Author:Elena Mayer, Olga Rogall, Anli Ding, Akash Nair, Agnė Žukauskaitė, Pavel Dmitrievich PupyrevORCiDGND, Alexey M. LomonosovORCiDGND, Andreas MayerGND
Year of Publication:2022
Date of first Publication:2022/10/09
Place of publication:Basel
Publisher:MDPI
First Page:1
Last Page:17
Article Number:1698
Parent Title (English):Micromachines
Editor:Alexandra Joshi-Imre
Volume:13
Issue:10
ISSN:2072-666X
DOI:https://doi.org/10.3390/mi13101698
URN:https://urn:nbn:de:bsz:ofb1-opus4-62107
Language:English
Institutes:Fakultät Betriebswirtschaft und Wirtschaftsingenieurwesen (B+W)
Institutes:Bibliografie
Tag:AlScN; elastic properties; laser ultrasound; magnetron sputter epitaxy; surface acoustic waves; thin films
Open Access: Open Access 
 Gold 
Relevance:Wiss. Zeitschriftenartikel reviewed: Listung in Master Journal List
Licence (German):License LogoCreative Commons - CC BY - Namensnennung 4.0 International