Determining Elastic Constants of AlScN Films on Silicon Substrates by Laser Ultrasonics
- Laser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the measurements. Results for their dependence on the Sc content are presented and compared toLaser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the measurements. Results for their dependence on the Sc content are presented and compared to corresponding data in the literature, obtained by alternative experimental methods or by ab-initio calculations.…
| Author: | Olga Rogall, Niclas M. Feil, Anli Ding, Elena Mayer, Pavel Dmitrievich PupyrevGND, Alexey M. LomonosovGND, Agnė Žukauskaitė, Oliver Ambacher, Andreas MayerGND |
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| Creating Corporation: | IEEE |
| Year of Publication: | 2020 |
| Pagenumber: | 4 |
| ISBN: | 978-1-7281-5448-0 (digital) |
| ISBN: | 978-1-7281-5449-7 (Print on Demand) |
| Language: | English |
| Parent Title (English): | 2020 Symposium Proceedings |
| ISSN: | 1948-5727 (digital) |
| ISSN: | 1948-5719 (Print on Demand) |
| Document Type: | Conference Proceeding |
| Institutes: | Bibliografie |
| Open Access: | Zugriffsbeschränkt |
| Release Date: | 2021/01/14 |
| Licence (German): |  Es gilt das UrhG |
| Note: | Konferenz: 2020 IEEE International Ultrasonics Symposium (IUS), 7-11 Sept. 2020, Las Vegas, NV, USA |
| DOI: | https://doi.org/10.1109/IUS46767.2020.9251632 |