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Determining Elastic Constants of AlScN Films on Silicon Substrates by Laser Ultrasonics

  • Laser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the measurements. Results for their dependence on the Sc content are presented and compared toLaser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the measurements. Results for their dependence on the Sc content are presented and compared to corresponding data in the literature, obtained by alternative experimental methods or by ab-initio calculations.show moreshow less

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Author:Olga Rogall, Niclas M. Feil, Anli Ding, Elena Mayer, Pavel Dmitrievich PupyrevGND, Alexey M. LomonosovGND, Agnė Žukauskaitė, Oliver Ambacher, Andreas MayerGND
Creating Corporation:IEEE
Year of Publication:2020
Page Number:4
ISBN:978-1-7281-5448-0 (digital)
ISBN:978-1-7281-5449-7 (Print on Demand)
Language:English
Parent Title (English):2020 Symposium Proceedings
ISSN:1948-5727 (digital)
ISSN:1948-5719 (Print on Demand)
Document Type:Conference Proceeding
Institutes:Bibliografie
Open Access:Zugriffsbeschränkt
Release Date:2021/01/14
Licence (German):License LogoEs gilt das UrhG
Note:
Konferenz: 2020 IEEE International Ultrasonics Symposium (IUS), 7-11 Sept. 2020, Las Vegas, NV, USA
DOI:https://doi.org/10.1109/IUS46767.2020.9251632