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Accurate characterization of SiO2 thin films using surface acoustic waves

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Author:Matthias Knapp, Alexey M. LomonosovGND, Paul Warkentin, Philipp M. Jäger, Werner Ruile, Hans-Peter Kirschner, Matthias Honal, Ingo Bleyl, Andreas MayerGND, Leonhard Michael Reindl
Year of Publication:2015
Language:English
GND Keyword:Akustik; Schallwelle
Parent Title (English):IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Volume:62
ISSN:1525-8955
First Page:736
Last Page:743
Document Type:Article (reviewed)
Institutes:Bibliografie
Release Date:2017/08/30
Licence (German):License LogoEs gilt das UrhG
DOI:https://doi.org/10.1109/TUFFC.2014.006921
Pubmed Id:http://www.ncbi.nlm.nih.gov/pubmed?term=25881351