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Partial substitution of Al atoms with Sc in wurtzite AlN crystals increases the piezoelectric constants. This leads to an increased electromechanical coupling, which is required for high bandwidths in piezo-acoustic filters. The crystal bonds in Ah-xScxN (AlScN) are softened as function of Sc atomic percentage x, leading to reduction of phase velocity in the film. Combining high Sc content AlScN films with high velocity substrates favors higher order guided surface acoustic wave (SAW) modes [1]. This study investigates higher order SAW modes in epitaxial AlScN on sapphire (Al2O3). Their dispersion for Pt metallized epitaxial AlScN films on Al2O3was computed for two different propagation directions. Computed phase velocity dispersion branches were experimentally verified by the characterization of fabricated SAW resonators. The results indicated four wave modes for the propagation direction (0°, 0°, 0°), featuring 3D polarized displacement fields. The sensitivity of the wave modes to the elastic constants of AlScN was investigated. It was shown that due to the 3D polarization of the waves, all elastic constants have an influence on the phase velocity and can be measured by suitable weighting functions in material constant extraction procedures.

Laser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the measurements. Results for their dependence on the Sc content are presented and compared to corresponding data in the literature, obtained by alternative experimental methods or by ab-initio calculations.

In einer SAW-Vorrichtung, welche einen SAW-Chip umfasst, der einen SAW-Wandler aufweist, welcher innerhalb einer ersten Signalleitung angeordnet ist, werden Parasitärsignale infolge höherer Harmonischer der Betriebsfrequenz der SAW-Vorrichtungen durch Kompensationsmittel elektrisch beseitigt, welche zumindest eine zweite Signalleitung mit Mitteln zum Erzeugen eines Aufhebungssignals, das im Vorzeichen oder in der Phase vom Parasitärsignal verschieden ist, oder eine Nebenschlussleitung zum elektrischen Verbinden des SAW-Wandlers mit einer rückseitigen Metallisierung des SAW-Chips umfassen.

In a SAW device comprises a SAW chip bearing a SAW transducer arranged within a first signal line parasitic signals due to higher harmonics of the operating frequency of the SAW devices are electrically eliminated by compensating means comprising at least one second signal line having means for producing a cancelling signal different in sign or phase to the parasitic signal, or a shunt line to electrically connect the SAW transducer to a back side metallization of the SAW chip.

High-precision signal processing algorithm to evaluate SAW properties as a function of temperature
(2013)

This paper presents a signal processing algorithm which accurately evaluates the SAW properties of a substrate as functions of temperature. The investigated acoustic properties are group velocity, phase velocity, propagation loss, and coupling coefficient. With several measurements carried out at different temperatures, we obtain the temperature dependency of the SAW properties. The analysis algorithm starts by reading the transfer functions of short and long delay lines. The analysis algorithm determines the center frequency of the delay lines and obtains the delay time difference between the short and long delay lines. The extracted parameters are then used to calculate the acoustic properties of the SAW material. To validate the algorithm, its accuracy is studied by determining the error in the calculating delay time difference, center frequency, and group velocity.

Nonlinearity can give rise to intermodulation distortions in surface acoustic wave (SAW) devices operating at high input power levels. To understand such undesired effects, a finite element method (FEM) simulation model in combination with a perturbation theory is applied to find out the role of different materials and higher order nonlinear tensor data for the nonlinearities in such acoustic devices. At high power, the SAW devices containing metal, piezoelectric substrate, and temperature compensating (TC) layers are subject to complicated geometrical, material, and other nonlinearities. In this paper, third-order nonlinearities in TC-SAW devices are investigated. The materials used are LiNbO 3 -rot128YX as the substrate and copper electrodes covered with a SiO 2 film as the TC layer. An effective nonlinearity constant for a given system is determined by comparison of nonlinear P-matrix simulations to third-order intermodulation measurements of test filters in a first step. By employing these constants from different systems, i.e., different metallization ratios, in nonlinear periodic P-matrix simulations, a direct comparison to nonlinear periodic FEM-simulations yields scaling factors for the materials used. Thus, the contribution of the different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of metal electrodes, substrate, and TC film are discussed in detail.

In the present work, nonlinearities in temperature
compensating (TC) SAW devices are investigated. The materials
used are LiNbO3-rot128YX as the substrate and Copper electrodes covered with a SiO2-layer as the compensating layer.
In order to understand the role of these materials for the
nonlinearities in such acoustic devices, a FEM simulation model
in combination with a perturbation approach [1] is applied.
The nonlinear tensor data of the different materials involved
in TC-SAW devices have been taken from literature, but were
partially modified to fit experimental data by introducing scaling factors. An effective nonlinearity constant is determined
by comparison of nonlinear P-matrix simulations to IMD3
measurements of test filters. By employing these constants in
nonlinear periodic P-matrix simulations a direct comparison to
nonlinear periodic FEM-simulations yields the scaling factors for
the material used. Thus, the contribution of different materials
to the nonlinear behavior of TC-SAW devices is obtained and
the role of metal electrodes is discussed in detail

In a recent paper it has been shown that the effective nonlinear constant which is used in a P-Matrix approach to describe third-order intermodulation (IMD3) in surface acoustic wave (SAW) devices can be obtained from finite element (FEM) calculations of a periodic cell using nonlinear tensor data [1]. In this paper we extend this FEM calculation and show that the IMD3 of an infinite periodic array of electrodes on a piezoelectric substrate can be directly simulated in the sagittal plane. This direct approach opens the way for a FEM based simulation of nonlinearities for finite and generalized structures avoiding the simplifications of phenomenological approaches.