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In anisotropic media, the existence of leaky surface acoustic waves is a well-known phenomenon. Very recently, their analogs at the apex of an elastic silicon wedge have been found in experiments using laser-ultrasonics. In addition to a wedge-wave (WW) pulse with low speed, a pseudo-wedge wave (p-WW) pulse was found with a velocity higher than the velocity of shear bulk waves, propagating in the same direction. With a probe-beam-deflection technique, the propagation of the WW pulses was monitored on one of the faces of the wedge at variable distance from the apex. In this way, their depth structure and the leakage of the p-WW could be visualized directly. Calculations were carried out using a method based on a representation of the displacement field in Laguerre functions. This method has been validated by calculating the surface density of states in anisotropic media and comparing the results with those obtained from the surface Green's tensor. The approach has then been extended to the continuum of acoustic modes in infinite wedges with fixed wave-vector along the apex. These calculations confirmed the measured speeds of the WW and p-WW pulses.
Anisotropy has been found to play an important role for the existence of edge-localized acoustic modes as well as for nonlinear effects in rectangular edges. For a certain propagation geometry in silicon, the effective second-order nonlinearity for wedge waves was determined numerically from second-order and third-order elastic moduli and compared with the nonlinearity for Rayleigh waves propagating in the direction of the apex on one of the two surfaces forming the edge. In the presence of weak dispersion resulting from modifications of the wedge tip or coating of the adjacent surfaces, solitary pulses are predicted to exist and their shape was calculated.
In this work the nonlinear behavior of layered surface acoustic wave (SAW) resonators is studied with the help of finite element (FE) computations. The full calculations depend strongly on the availability of accurate tensor data. While there are accurate material data for linear computations, the complete sets of higher-order material constants, needed for nonlinear simulations, are still not available for relevant materials. To overcome this problem, scaling factors were used for each available nonlinear tensor. The approach here considers piezoelectricity, dielectricity, electrostriction, and elasticity constants up to the fourth order. These factors act as a phenomenological estimate for incomplete tensor data. Since no set of fourth-order material constants for LiTaO3 is available, an isotropic approximation for the fourth-order elastic constants was applied. As a result, it was found that the fourth-order elastic tensor is dominated by one-fourth order Lamé constant. With the help of the FE model, derived in two different, but equivalent ways, we investigate the nonlinear behavior of a SAW resonator with a layered material stack. The focus was set to third-order nonlinearity. Accordingly, the modeling approach is validated using measurements of third-order effects in test resonators. In addition, the acoustic field distribution is analyzed.
In the framework of electro-elasticity theory and the finite element method (FEM), a model is set up for the computation of quantities in surface acoustic wave (SAW) devices accounting for nonlinear effects. These include second-order and third-order intermodulations, second and third harmonic generation and the influence of electro-acoustic nonlinearity on the frequency characteristics of SAW resonators. The model is based on perturbation theory, and requires input material constants, e.g., the elastic moduli up to fourth order for all materials involved. The model is two-dimensional, corresponding to an infinite aperture, but all three Cartesian components of the displacement and electrical fields are accounted for. The first version of the model pertains to an infinite periodic arrangement of electrodes. It is subsequently generalized to systems with a finite number of electrodes. For the latter version, a recursive algorithm is presented which is related to the cascading scheme of Plessky and Koskela and strongly reduces computation time and memory requirements. The model is applied to TC-SAW systems with copper electrodes buried in an oxide film on a LiNbO3 substrate. Results of computations are presented for the electrical current due to third-order intermodulations and the displacement field associated with the second harmonic and second-order intermodulations, generated by monochromatic input tones. The scope of this review is limited to methodological aspects with the goal to enable calculations of nonlinear quantities in SAW devices on inexpensive and easily accessible computing platforms.
A simple model is introduced that describes the interaction of surface acoustic waves (SAWs) with a 2D periodic array of objects on the surface that give rise to internal resonances. Such objects may be high-aspect ratio structures like micro-pillars fabricated of a material different from that of the substrate. The model allows for an approximate determination of the band structure for the acoustic modes in such systems. Results are presented for the dependence on structural parameters of a total bandgap in the non-radiative regime of a semi-infinite substrate, and it is shown how the frequency and radiation damping of vibrational modes can be determined that are associated with defects in the periodic 2D array.
In the present work, nonlinearities in temperature compensating (TC) SAW devices are investigated. The materials used are LiNbO₃-rot128YX as the substrate and Copper electrodes covered with a SiO₂-layer as the compensating layer. In order to understand the role of these materials for the nonlinearities in such acoustic devices, a FEM simulation model in combination with a perturbation approach is applied. The nonlinear tensor data of the different materials involved in TC-SAW devices have been taken from literature, but were partially modified to fit experimental data by introducing scaling factors. An effective nonlinearity constant is determined by comparison of nonlinear P-matrix simulations to IMD3 measurements of test filters. By employing these constants in nonlinear periodic P-matrix simulations a direct comparison to nonlinear periodic FEM-simulations yields the scaling factors for the material used. Thus, the contribution of different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of metal electrodes is discussed in detail.
This work focuses on the dependencies between typical design parameters of surface acoustic wave (SAW) resonators and the nonlinear emitted signals of second and third order. The parameters metalization ratio and pitch are used as examples, but the approach can be extended to other design parameters as well. It is shown, that the interaction between the nonlinear current generation and the linear admittance is defining the measured nonlinear power signals. It is also discussed, that changes in linear properties get more pronounced in nonlinear responses. Therefore, slight effects on linear parameters will have significant influence on the observed nonlinearity.
Nonlinear acoustic waves are considered that have displacements localized at the tip of an elastic wedge. The evolution equation governing their propagation is discussed and compared with its analogues pertaining to nonlinear acoustic surface and bulk waves. Solitary wave solutions of the evolution equation have been determined numerically for the cases of two rectangular edges which may be viewed as generated by splitting a half-space, consisting of crystalline silicon, into two quarter-spaces. For these two geometries, the kernel in the nonlinear terms of the evolution equation has been calculated from the second-order and third-order elastic constants of silicon, and weak dispersion due to tip truncation has been considered. Solitary pulse shapes have been computed and collisions of solitary pulses have been simulated for various relative speeds of the two collision partners. Collision scenarios for the two wedge geometries were found to differ considerably. Special attention is paid to the peculiar interaction of two initially identical solitary pulses.
Acoustic waves are investigated which are guided at the edge (apex line) of a wedge-shaped elastic body or at the edge of an elastic plate. The edges contain a periodic sequence of modifications, consisting either of indentations or inclusions with a different elastic material which gives rise to high acoustic mismatch. Dispersion relations are computed with the help of the finite element method. They exhibit zero-group velocity points on the dispersion branches of edge-localized acoustic modes. These special points also occur at Bloch-Floquet wavenumbers away from the Brillouin zone boundary. Deep indentations lead to flat branches corresponding to largely non-interacting, Einstein-oscillator like vibrations of the tongues between the grooves of the periodic structure. Due to the nonlinearity of the elastic media, quantified by their third-order elastic constants, an acoustic mode localized at a periodically modified edge generates a second harmonic which partly consists of surface and plate modes propagating into the elastic medium in the direction vertical to the edge. This acoustic radiation at the second-harmonic frequency is investigated for an elastic plate and a truncated sharp-angle wedge with periodic inclusions at their edges. Unlike nonlinear bulk wave generation by surface acoustic waves in an interdigital structure, surface and plate mode radiation by edge-localized modes can be visualized directly in laser-ultrasound experiments.