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Accurate characterization of SiO2 thin films using surface acoustic waves (2015)

Knapp, Matthias ; Lomonosov, Alexey M. ; Warkentin, Paul ; Jäger, Philipp M. ; Ruile, Werner ; Kirschner, Hans-Peter ; Honal, Matthias ; Bleyl, Ingo ; Mayer, Andreas ; Reindl, Leonhard Michael

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