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A theoretical description is given for the propagation of surface acoustic wave pulses in anisotropic elastic media subject to the influence of nonlinearity. On the basis of nonlinear elasticity theory, an evolution equation is presented for the surface slope or the longitudinal surface velocity associated with an acoustic pulse. It contains a non-local nonlinearity, characterized by a kernel that strongly varies from one propagation geometry to another due to the anisotropy of the substrate. It governs pulse shape evolution in homogeneous halfspaces and the shapes of solitary surface pulses that exist in coated substrates. The theory describing nonlinear Rayleigh-type surface acoustic waves is extended in a straightforward way to surface waves that are localized at a one-dimensional acoustic waveguide like elastic wedges.
Anisotropy has been found to play an important role for the existence of edge-localized acoustic modes as well as for nonlinear effects in rectangular edges. For a certain propagation geometry in silicon, the effective second-order nonlinearity for wedge waves was determined numerically from second-order and third-order elastic moduli and compared with the nonlinearity for Rayleigh waves propagating in the direction of the apex on one of the two surfaces forming the edge. In the presence of weak dispersion resulting from modifications of the wedge tip or coating of the adjacent surfaces, solitary pulses are predicted to exist and their shape was calculated.
A simple model is introduced that describes the interaction of surface acoustic waves (SAWs) with a 2D periodic array of objects on the surface that give rise to internal resonances. Such objects may be high-aspect ratio structures like micro-pillars fabricated of a material different from that of the substrate. The model allows for an approximate determination of the band structure for the acoustic modes in such systems. Results are presented for the dependence on structural parameters of a total bandgap in the non-radiative regime of a semi-infinite substrate, and it is shown how the frequency and radiation damping of vibrational modes can be determined that are associated with defects in the periodic 2D array.
Surface and interface acoustic waves are two-dimensionally guided waves, as their displacement field is plane-wave like regarding its dependence on the spatial coordinates parallel to the guiding plane, while it decays exponentially along the axis normal to that plane. When propagating at the planar surface or interface of homogeneous media, they are non-dispersive. Another type of non-dispersive acoustic waves which is, however, one-dimensionally guided, has displacement fields localized near the apex of a wedge made of an elastic material. In this short review, their propagation properties are described as well as theoretical and experimental methods which have been used for their analysis. Experimental findings are discussed in comparison with corresponding theoretical work and potential applications of this fascinating type of acoustic waves are presented.
Rotation of an elastic medium gives rise to a shift of frequency of its acoustic modes, i.e., the time-period vibrations that exist in it. This frequency shift is investigated by applying perturbation theory in the regime of small ratios of the rotation velocity and the frequency of the acoustic mode. In an expansion of the relative frequency shift in powers of this ratio, upper bounds are derived for the first-order and the second-order terms. The derivation of the theoretical upper bounds of the first-order term is presented for linear vibration modes as well as for stable nonlinear vibrations with periodic time dependence that can be represented by a Fourier series.
Silicon edges as one-dimensional waveguides for dispersion-free and supersonic leaky wedge waves
(2012)
Acoustic waves guided by the cleaved edge of a Si(111) crystal were studied using a laser-based angle-tunable transducer for selectively launching isolated wedge or surface modes. A supersonic leaky wedge wave and the fundamental wedge wave were observed experimentally and confirmed theoretically. Coupling of the supersonic wave to shear waves is discussed, and its leakage into the surface acoustic wave was observed directly. The velocity and penetration depth of the wedge waves were determined by contact-free optical probing. Thus, a detailed experimental and theoretical study of linear one-dimensional guided modes in silicon is presented.
Recently a P-matrix and COM formalism was presented, which predicts third order intermodulation (IMD3) and triple beat with good accuracy and needs only a single nonlinearity constant. This formalism describes frequency dependence correctly. In this work the dependence of this nonlinearity constant on metalization ratio is investigated for aluminum metalization on LiTaO 3 (YXl)/42°. By comparison to test devices the nonlinearity constant is shown to be largely independent of metalization ratio. The nonlinear effect, however, strongly depends on metalization ratio, which is well described by the model. The linearity of a duplexer is optimized by reduction of metalization ratio and redesign of Tx branch topology.
A laser-operated, angle-tunable transducer was employed to excite selectively elastic waves guided along the apex of a solid wedge. The propagation of wedge waves at anisotropic monocrystalline silicon edges with different symmetry properties was studied by optical detection. The reduced symmetry in crystals, as compared to isotropic media, causes a number of new features, such as the existence of supersonic leaky wedge waves, tilted spatial pulse profiles, and other peculiarities of their localization. Experimental and theoretical results are presented for three different types of symmetry configurations: the wedge symmetric about its midplane, the wedge symmetric about the plane normal to its apex line, and the wedge symmetric about one of its faces. The experiments include accurate measurements of the phase velocity and the wave field distribution, providing information on localization and coupling of wedge waves with other waves. Theoretically, the wedge waves were treated by the Laguerre function method, extended to modes that are not localized at the tip of the wedge. This approach allowed an accurate description of the observed localized and leaky wedge waves in anisotropic wedges.
The characteristic features and applications of linear and nonlinear guided elastic waves propagating along surfaces (2D) and wedges (1D) are discussed. Laser-based excitation, detection, or contact-free analysis of these guided waves with pump–probe methods are reviewed. Determination of material parameters by broadband surface acoustic waves (SAWs) and other applications in nondestructive evaluation (NDE) are considered. The realization of nonlinear SAWs in the form of solitary waves and as shock waves, used for the determination of the fracture strength, is described. The unique properties of dispersion-free wedge waves (WWs) propagating along homogeneous wedges and of dispersive wedge waves observed in the presence of wedge modifications such as tip truncation or coatings are outlined. Theoretical and experimental results on nonlinear wedge waves in isotropic and anisotropic solids are presented.
In anisotropic media, the existence of leaky surface acoustic waves is a well-known phenomenon. Very recently, their analogs at the apex of an elastic silicon wedge have been found in experiments using laser-ultrasonics. In addition to a wedge-wave (WW) pulse with low speed, a pseudo-wedge wave (p-WW) pulse was found with a velocity higher than the velocity of shear bulk waves, propagating in the same direction. With a probe-beam-deflection technique, the propagation of the WW pulses was monitored on one of the faces of the wedge at variable distance from the apex. In this way, their depth structure and the leakage of the p-WW could be visualized directly. Calculations were carried out using a method based on a representation of the displacement field in Laguerre functions. This method has been validated by calculating the surface density of states in anisotropic media and comparing the results with those obtained from the surface Green's tensor. The approach has then been extended to the continuum of acoustic modes in infinite wedges with fixed wave-vector along the apex. These calculations confirmed the measured speeds of the WW and p-WW pulses.
In this work a set of nonlinear coupled COM equations at interacting frequencies is derived on the basis of nonlinear electro-elasticity. The formalism is presented with the aim of describing intermodulation distortion of third-order (IMD3) and triple beat. The resulting COM equations are translated to the P-matrix formalism, where care is taken to obtain the correct frequency dependence. The scheme depends on two frequency-independent constants for an effective third-order nonlinearity. One of these two constants is negligibly small in the systems considered here. The P-matrix approach is applied to single filters and duplexers on LiTaO 3 (YXl)/42° operating in different frequency ranges. Both IMD3 and triple beat show good agreement with measurement.
The existence of acoustic waves with displacements localized at the tip of an isotropic elastic wedge was rigorously proven by Kamotskii, Zavorokhin and Nazarov. This proof, which is based on a variational approach, is extended to rectangular anisotropic wedges. For two high-symmetry configurations of rectangular edges in elastic media with tetragonal symmetry, a criterion is derived that allows identifying the boundary between the regions of existence for wedge modes of even and odd symmetry in regions of parameter space, where even- and odd-symmetry modes do not exist simultaneously. Furthermore, rectangular edges with non-equivalent surfaces are analyzed, and it is shown that at rectangular edges of cubic elastic media with one (110) surface and one (001) surface, a tip-localized guided wave always exists, apart from special cases that are characterized.
Laser pulses focused near the tip of an elastic wedge generate acoustic waves guided at its apex. The shapes of the acoustic wedge wave pulses depend on the energy and the profile of the exciting laser pulse and on the anisotropy of the elastic medium the wedge is made of. Expressions for the acoustic pulse shapes have been derived in terms of the modal displacement fields of wedge waves for laser excitation in the thermo-elastic regime and for excitation via a pressure pulse exerted on the surface. The physical quantity considered is the local inclination of a surface of the wedge, which is measured optically by laser-probe-beam deflection. Experimental results on pulse shapes in the thermo-elastic regime are presented and confirmed by numerical calculations. They pertain to an isotropic sharp-angle wedge with two wedge-wave branches and to a non-reciprocity phenomenon at rectangular silicon edges.
In a recent paper it has been shown that the effective nonlinear constant which is used in a P-Matrix approach to describe third-order intermodulation (IMD3) in surface acoustic wave (SAW) devices can be obtained from finite element (FEM) calculations of a periodic cell using nonlinear tensor data [1]. In this paper we extend this FEM calculation and show that the IMD3 of an infinite periodic array of electrodes on a piezoelectric substrate can be directly simulated in the sagittal plane. This direct approach opens the way for a FEM based simulation of nonlinearities for finite and generalized structures avoiding the simplifications of phenomenological approaches.
The growing complexity in RF front-ends, which support carrier aggregation and a growing number of frequency bands, leads to tightened nonlinearity requirements in all sub-components. The generation of third order intermodulation products (IMD3) are typical problems caused by the non-linearity of SAW devices. In the present work, we investigate temperature compensating (TC) SAW devices on Lithium Niobate-rot128YX. An accurate FEM simulation model [1] is employed, which allows to better understand the origin of nonlinearities in such acoustic devices.
Elastic constants of components are usually determined by tensile tests in combination with ultrasonic experiments. However, these properties may change due to e.g. mechanical treatments or service conditions during their lifetime. Knowledge of the actual material parameters is key to the determination of quantities like residual stresses present in the medium. In this work the acoustic nonlinearity parameter (ANP) for surface acoustic waves is examined through the derivation of an evolution equation for the amplitude of the second harmonic. Given a certain depth profile of the third-order elastic constants, the dependence of the ANP with respect to the input frequency is determined and on the basis of these results, an appropriate inversion method is developed. This method is intended for the extraction of the depth dependence of the third-order elastic constants of the material from second-harmonic generation and guided wave mixing experiments, assuming that the change in the linear Rayleigh wave velocity is small. The latter assumption is supported by a 3D-FEM model study of a medium with randomly distributed microcracks as well as theoretical works on this topic in the literature.