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The growing complexity in RF front-ends, which support carrier aggregation and a growing number of frequency bands, leads to tightened nonlinearity requirements in all sub-components. The generation of third order intermodulation products (IMD3) are typical problems caused by the non-linearity of SAW devices. In the present work, we investigate temperature compensating (TC) SAW devices on Lithium Niobate-rot128YX. An accurate FEM simulation model [1] is employed, which allows to better understand the origin of nonlinearities in such acoustic devices.
In the present work, nonlinearities in temperature compensating (TC) SAW devices are investigated. The materials used are LiNbO₃-rot128YX as the substrate and Copper electrodes covered with a SiO₂-layer as the compensating layer. In order to understand the role of these materials for the nonlinearities in such acoustic devices, a FEM simulation model in combination with a perturbation approach is applied. The nonlinear tensor data of the different materials involved in TC-SAW devices have been taken from literature, but were partially modified to fit experimental data by introducing scaling factors. An effective nonlinearity constant is determined by comparison of nonlinear P-matrix simulations to IMD3 measurements of test filters. By employing these constants in nonlinear periodic P-matrix simulations a direct comparison to nonlinear periodic FEM-simulations yields the scaling factors for the material used. Thus, the contribution of different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of metal electrodes is discussed in detail.
In this work a set of nonlinear coupled COM equations at interacting frequencies is derived on the basis of nonlinear electro-elasticity. The formalism is presented with the aim of describing intermodulation distortion of third-order (IMD3) and triple beat. The resulting COM equations are translated to the P-matrix formalism, where care is taken to obtain the correct frequency dependence. The scheme depends on two frequency-independent constants for an effective third-order nonlinearity. One of these two constants is negligibly small in the systems considered here. The P-matrix approach is applied to single filters and duplexers on LiTaO 3 (YXl)/42° operating in different frequency ranges. Both IMD3 and triple beat show good agreement with measurement.
A simple model is introduced that describes the interaction of surface acoustic waves (SAWs) with a 2D periodic array of objects on the surface that give rise to internal resonances. Such objects may be high-aspect ratio structures like micro-pillars fabricated of a material different from that of the substrate. The model allows for an approximate determination of the band structure for the acoustic modes in such systems. Results are presented for the dependence on structural parameters of a total bandgap in the non-radiative regime of a semi-infinite substrate, and it is shown how the frequency and radiation damping of vibrational modes can be determined that are associated with defects in the periodic 2D array.
In a recent paper it has been shown that the effective nonlinear constant which is used in a P-Matrix approach to describe third-order intermodulation (IMD3) in surface acoustic wave (SAW) devices can be obtained from finite element (FEM) calculations of a periodic cell using nonlinear tensor data [1]. In this paper we extend this FEM calculation and show that the IMD3 of an infinite periodic array of electrodes on a piezoelectric substrate can be directly simulated in the sagittal plane. This direct approach opens the way for a FEM based simulation of nonlinearities for finite and generalized structures avoiding the simplifications of phenomenological approaches.
The advantages of the coupling-of-modes (COM) formalism and the transmission-matrix approach are combined to create exact and computationally efficient analysis and synthesis CAD tools for the design of SAW-resonator filters. The models for the filter components, especially gratings, interdigital transducers (IDTs). and multistrip couplers (MSCs), are based on the COM approach, which delivers closed-form expressions. In order to determine the relevant COM parameters, the integrated COM differential equations are compared with analytically derived expressions from the transmission-matrix approach. The most important second-order effects such as energy storage, propagation loss and mechanical and electrical loading are fully taken into account. As an example, the authors investigate a two-pole, acoustically coupled resonator filter at 914.5 MHz on AT quartz. Excellent agreement between theory and measurement is found.
Recently a P-matrix and COM formalism was presented, which predicts third order intermodulation (IMD3) and triple beat with good accuracy and needs only a single nonlinearity constant. This formalism describes frequency dependence correctly. In this work the dependence of this nonlinearity constant on metalization ratio is investigated for aluminum metalization on LiTaO 3 (YXl)/42°. By comparison to test devices the nonlinearity constant is shown to be largely independent of metalization ratio. The nonlinear effect, however, strongly depends on metalization ratio, which is well described by the model. The linearity of a duplexer is optimized by reduction of metalization ratio and redesign of Tx branch topology.
A Nonlinear FEM Model to Calculate Third-Order Harmonic and Intermodulation in TC-SAW Devices
(2018)
Nonlinearities in Temperature Compensated SAW (TC-SAW) devices in the 2 GHz range are investigated using a nonlinear finite element model by simultaneously considering both third-order intermodulation distortion (IMD3)and third harmonic (H3). In the employed perturbation approach, different contributions to the total H3, the direct and indirect contribution, are discussed. H3 and IMD3 measurements were fitted simultaneously using scaling factors for SiO 2 film and Cu electrode nonlinear material tensors in TC-SAW devices. We employ a P-Matrix simulation as intermediate step: Firstly, measurement and nonlinear P-Matrix calculations for finite devices are compared and coefficients of the P-Matrix simulation are determined. The nonlinear tensor data of the different materials involved in periodic nonlinear finite element method (FEM) computations are optimized to fit periodic P-Matrix calculations by introducing scaling factors. Thus, the contribution of different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of materials is discussed.