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Nonlinearity can give rise to intermodulation distortions in surface acoustic wave (SAW) devices operating at high input power levels. To understand such undesired effects, a finite element method (FEM) simulation model in combination with a perturbation theory is applied to find out the role of different materials and higher order nonlinear tensor data for the nonlinearities in such acoustic devices. At high power, the SAW devices containing metal, piezoelectric substrate, and temperature compensating (TC) layers are subject to complicated geometrical, material, and other nonlinearities. In this paper, third-order nonlinearities in TC-SAW devices are investigated. The materials used are LiNbO 3 -rot128YX as the substrate and copper electrodes covered with a SiO 2 film as the TC layer. An effective nonlinearity constant for a given system is determined by comparison of nonlinear P-matrix simulations to third-order intermodulation measurements of test filters in a first step. By employing these constants from different systems, i.e., different metallization ratios, in nonlinear periodic P-matrix simulations, a direct comparison to nonlinear periodic FEM-simulations yields scaling factors for the materials used. Thus, the contribution of the different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of metal electrodes, substrate, and TC film are discussed in detail.

For an elastic medium containing a homogeneous distribution of micro-cracks, an effective one-dimensional stress-strain relation has been determined with finite element simulations. In addition to flat micro-cracks, voids were considered that contain a Hertzian contact, which represents an example for micro-cracks with internal structure. The orientation of both types of micro-cracks was fully aligned or, for flat micro-cracks, totally random. For micro-cracks with Hertzian contacts, the case of random orientation was treated in an approximate way. The two types of defects were found to give rise to different degrees of non-analytic behavior of the effective stress-strain relation, which governs the nonlinear propagation of symmetric (S0) Lamb waves in the long-wavelength limit. The presence of flat micro-cracks causes even harmonics to grow linearly with propagation distance with amplitudes proportional to the amplitude of the fundamental wave, and gives rise to a static strain. The presence of the second type of defects leads to a linear growth of all harmonics with amplitudes proportional to the power 3/2 of the fundamental amplitude, and to a strain-dependent velocity shift. Simple expressions are given for the growth rates of higher harmonics of S0 Lamb waves in terms of the parameters occurring in the effective stress-strain relation. They have partly been determined quantitatively with the help of the FEM results for different micro-crack concentrations.

In the present work, nonlinearities in temperature
compensating (TC) SAW devices are investigated. The materials
used are LiNbO3-rot128YX as the substrate and Copper electrodes covered with a SiO2-layer as the compensating layer.
In order to understand the role of these materials for the
nonlinearities in such acoustic devices, a FEM simulation model
in combination with a perturbation approach [1] is applied.
The nonlinear tensor data of the different materials involved
in TC-SAW devices have been taken from literature, but were
partially modified to fit experimental data by introducing scaling factors. An effective nonlinearity constant is determined
by comparison of nonlinear P-matrix simulations to IMD3
measurements of test filters. By employing these constants in
nonlinear periodic P-matrix simulations a direct comparison to
nonlinear periodic FEM-simulations yields the scaling factors for
the material used. Thus, the contribution of different materials
to the nonlinear behavior of TC-SAW devices is obtained and
the role of metal electrodes is discussed in detail

Silicon edges as one-dimensional waveguides for dispersion-free and supersonic leaky wedge waves
(2012)

Acoustic waves guided by the cleaved edge of a Si(111) crystal were studied using a laser-based angle-tunable transducer for selectively launching isolated wedge or surface modes. A supersonic leaky wedge wave and the fundamental wedge wave were observed experimentally and confirmed theoretically. Coupling of the supersonic wave to shear waves is discussed, and its leakage into the surface acoustic wave was observed directly. The velocity and penetration depth of the wedge waves were determined by contact-free optical probing. Thus, a detailed experimental and theoretical study of linear one-dimensional guided modes in silicon is presented.

Existing ultrasonic stress evaluation methods utilize the acoustoelastic effect for bulk waves propagating in volume, which is unsuitable for a surface treated material, possessing a significant variation in material properties with depth. With knowledge of nonlinear elastic parameters – third-order elastic constants (TOEC) close to the surface of the sample, the acoustoelastic effect might be used with surface acoustic waves. This work is focused on the development of an independent method of TOEC measurement using the effect of nonlinear surface acoustic waves scattering – i.e. the effect of elastic waves interaction in a nonlinear medium.
In this paper, the possible three wave interactions of surface guided waves and bulk waves are described and formulae for the efficiency of harmonic generation and mode mixing are derived. A comparison of the efficiency of surface waves scattering in an isotropic medium for different interaction types is carried out with the help of nonlinear perturbation theory. First results for surface and bulk wave mixing with known second- and third-order elastic constants are shown.

A theoretical description is given for the propagation of surface acoustic wave pulses in anisotropic elastic media subject to the influence of nonlinearity. On the basis of nonlinear elasticity theory, an evolution equation is presented for the surface slope or the longitudinal surface velocity associated with an acoustic pulse. It contains a non-local nonlinearity, characterized by a kernel that strongly varies from one propagation geometry to another due to the anisotropy of the substrate. It governs pulse shape evolution in homogeneous halfspaces and the shapes of solitary surface pulses that exist in coated substrates. The theory describing nonlinear Rayleigh-type surface acoustic waves is extended in a straightforward way to surface waves that are localized at a one-dimensional acoustic waveguide like elastic wedges.

In numerical calculations, guided acoustic waves, localized in two spatial dimensions, have been shown to exist and their properties have been investigated in three different geometries, (i) a half-space consisting of two elastic media with a planar interface inclined to the common surface, (ii) a wedge made of two elastic media with a planar interface, and (iii) the free edge of an elastic layer between two quarter-spaces or two wedge-shaped pieces of a material with elastic properties and density differing from those of the intermediate layer.
For the special case of Poisson media forming systems (i) and (ii), the existence ranges of these 1D guided waves in parameter space have been determined and found to strongly depend on the inclination angle between surface and interface in case (i) and the wedge angle in case (ii). In a system of type (ii) made of two materials with strong acoustic mismatch and in systems of type (iii), leaky waves have been found with a high degree of spatial localization of the associated displacements, although the two materials constituting these structures are isotropic.
Both the fully guided and the leaky waves analyzed in this work could find applications in non-destructive evaluation of composite structures and should be accounted for in geophysical prospecting, for example.
A critical comparison is presented of the two computational approaches employed, namely a semi-analytical finite element scheme and a method based on an expansion of the displacement field in a double series of special functions.

In a SAW device comprises a SAW chip bearing a SAW transducer arranged within a first signal line parasitic signals due to higher harmonics of the operating frequency of the SAW devices are electrically eliminated by compensating means comprising at least one second signal line having means for producing a cancelling signal different in sign or phase to the parasitic signal, or a shunt line to electrically connect the SAW transducer to a back side metallization of the SAW chip.