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Anisotropy has been found to play an important role for the existence of edge-localized acoustic modes as well as for nonlinear effects in rectangular edges. For a certain propagation geometry in silicon, the effective second-order nonlinearity for wedge waves was determined numerically from second-order and third-order elastic moduli and compared with the nonlinearity for Rayleigh waves propagating in the direction of the apex on one of the two surfaces forming the edge. In the presence of weak dispersion resulting from modifications of the wedge tip or coating of the adjacent surfaces, solitary pulses are predicted to exist and their shape was calculated.
Laser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the measurements. Results for their dependence on the Sc content are presented and compared to corresponding data in the literature, obtained by alternative experimental methods or by ab-initio calculations.
Propagation of acoustic waves is considered in a system consisting of two stiff quarter-spaces connected by a planar soft layer. The two quarter-spaces and the layer form a half-space with a planar surface. In a numerical study, surface waves have been found and analyzed in this system with displacements that are localized not only at the surface, but also in the soft layer. In addition to the semi-analytical finite element method, an alternative approach based on an expansion of the displacement field in a double series of Laguerre functions and Legendre polynomials has been applied.
It is shown that a number of branches of the mode spectrum can be interpreted and remarkably well described by perturbation theory, where the zero-order modes are the wedge waves guided at a rectangular edge of the stiff quarter-spaces or waves guided at the edge of a soft plate with rigid surfaces.
For elastic moduli and densities corresponding to the material combination PMMA–silicone–PMMA, at least one of the branches in the dispersion relation of surface waves trapped in the soft layer exhibits a zero-group velocity point.
Potential applications of these 1D guided surface waves in non-destructive evaluation are discussed.
In the framework of electro-elasticity theory and the finite element method (FEM), a model is set up for the computation of quantities in surface acoustic wave (SAW) devices accounting for nonlinear effects. These include second-order and third-order intermodulations, second and third harmonic generation and the influence of electro-acoustic nonlinearity on the frequency characteristics of SAW resonators. The model is based on perturbation theory, and requires input material constants, e.g., the elastic moduli up to fourth order for all materials involved. The model is two-dimensional, corresponding to an infinite aperture, but all three Cartesian components of the displacement and electrical fields are accounted for. The first version of the model pertains to an infinite periodic arrangement of electrodes. It is subsequently generalized to systems with a finite number of electrodes. For the latter version, a recursive algorithm is presented which is related to the cascading scheme of Plessky and Koskela and strongly reduces computation time and memory requirements. The model is applied to TC-SAW systems with copper electrodes buried in an oxide film on a LiNbO3 substrate. Results of computations are presented for the electrical current due to third-order intermodulations and the displacement field associated with the second harmonic and second-order intermodulations, generated by monochromatic input tones. The scope of this review is limited to methodological aspects with the goal to enable calculations of nonlinear quantities in SAW devices on inexpensive and easily accessible computing platforms.
A simple model is introduced that describes the interaction of surface acoustic waves (SAWs) with a 2D periodic array of objects on the surface that give rise to internal resonances. Such objects may be high-aspect ratio structures like micro-pillars fabricated of a material different from that of the substrate. The model allows for an approximate determination of the band structure for the acoustic modes in such systems. Results are presented for the dependence on structural parameters of a total bandgap in the non-radiative regime of a semi-infinite substrate, and it is shown how the frequency and radiation damping of vibrational modes can be determined that are associated with defects in the periodic 2D array.
Rotation of an elastic medium gives rise to a shift of frequency of its acoustic modes, i.e., the time-period vibrations that exist in it. This frequency shift is investigated by applying perturbation theory in the regime of small ratios of the rotation velocity and the frequency of the acoustic mode. In an expansion of the relative frequency shift in powers of this ratio, upper bounds are derived for the first-order and the second-order terms. The derivation of the theoretical upper bounds of the first-order term is presented for linear vibration modes as well as for stable nonlinear vibrations with periodic time dependence that can be represented by a Fourier series.
Recently a P-matrix and COM formalism was presented, which predicts third order intermodulation (IMD3) and triple beat with good accuracy and needs only a single nonlinearity constant. This formalism describes frequency dependence correctly. In this work the dependence of this nonlinearity constant on metalization ratio is investigated for aluminum metalization on LiTaO 3 (YXl)/42°. By comparison to test devices the nonlinearity constant is shown to be largely independent of metalization ratio. The nonlinear effect, however, strongly depends on metalization ratio, which is well described by the model. The linearity of a duplexer is optimized by reduction of metalization ratio and redesign of Tx branch topology.
A laser-operated, angle-tunable transducer was employed to excite selectively elastic waves guided along the apex of a solid wedge. The propagation of wedge waves at anisotropic monocrystalline silicon edges with different symmetry properties was studied by optical detection. The reduced symmetry in crystals, as compared to isotropic media, causes a number of new features, such as the existence of supersonic leaky wedge waves, tilted spatial pulse profiles, and other peculiarities of their localization. Experimental and theoretical results are presented for three different types of symmetry configurations: the wedge symmetric about its midplane, the wedge symmetric about the plane normal to its apex line, and the wedge symmetric about one of its faces. The experiments include accurate measurements of the phase velocity and the wave field distribution, providing information on localization and coupling of wedge waves with other waves. Theoretically, the wedge waves were treated by the Laguerre function method, extended to modes that are not localized at the tip of the wedge. This approach allowed an accurate description of the observed localized and leaky wedge waves in anisotropic wedges.
The characteristic features and applications of linear and nonlinear guided elastic waves propagating along surfaces (2D) and wedges (1D) are discussed. Laser-based excitation, detection, or contact-free analysis of these guided waves with pump–probe methods are reviewed. Determination of material parameters by broadband surface acoustic waves (SAWs) and other applications in nondestructive evaluation (NDE) are considered. The realization of nonlinear SAWs in the form of solitary waves and as shock waves, used for the determination of the fracture strength, is described. The unique properties of dispersion-free wedge waves (WWs) propagating along homogeneous wedges and of dispersive wedge waves observed in the presence of wedge modifications such as tip truncation or coatings are outlined. Theoretical and experimental results on nonlinear wedge waves in isotropic and anisotropic solids are presented.
In anisotropic media, the existence of leaky surface acoustic waves is a well-known phenomenon. Very recently, their analogs at the apex of an elastic silicon wedge have been found in experiments using laser-ultrasonics. In addition to a wedge-wave (WW) pulse with low speed, a pseudo-wedge wave (p-WW) pulse was found with a velocity higher than the velocity of shear bulk waves, propagating in the same direction. With a probe-beam-deflection technique, the propagation of the WW pulses was monitored on one of the faces of the wedge at variable distance from the apex. In this way, their depth structure and the leakage of the p-WW could be visualized directly. Calculations were carried out using a method based on a representation of the displacement field in Laguerre functions. This method has been validated by calculating the surface density of states in anisotropic media and comparing the results with those obtained from the surface Green's tensor. The approach has then been extended to the continuum of acoustic modes in infinite wedges with fixed wave-vector along the apex. These calculations confirmed the measured speeds of the WW and p-WW pulses.
In this work the nonlinear behavior of layered surface acoustic wave (SAW) resonators is studied with the help of finite element (FE) computations. The full calculations depend strongly on the availability of accurate tensor data. While there are accurate material data for linear computations, the complete sets of higher-order material constants, needed for nonlinear simulations, are still not available for relevant materials. To overcome this problem, scaling factors were used for each available nonlinear tensor. The approach here considers piezoelectricity, dielectricity, electrostriction, and elasticity constants up to the fourth order. These factors act as a phenomenological estimate for incomplete tensor data. Since no set of fourth-order material constants for LiTaO3 is available, an isotropic approximation for the fourth-order elastic constants was applied. As a result, it was found that the fourth-order elastic tensor is dominated by one-fourth order Lamé constant. With the help of the FE model, derived in two different, but equivalent ways, we investigate the nonlinear behavior of a SAW resonator with a layered material stack. The focus was set to third-order nonlinearity. Accordingly, the modeling approach is validated using measurements of third-order effects in test resonators. In addition, the acoustic field distribution is analyzed.
Surface and interface acoustic waves are two-dimensionally guided waves, as their displacement field is plane-wave like regarding its dependence on the spatial coordinates parallel to the guiding plane, while it decays exponentially along the axis normal to that plane. When propagating at the planar surface or interface of homogeneous media, they are non-dispersive. Another type of non-dispersive acoustic waves which is, however, one-dimensionally guided, has displacement fields localized near the apex of a wedge made of an elastic material. In this short review, their propagation properties are described as well as theoretical and experimental methods which have been used for their analysis. Experimental findings are discussed in comparison with corresponding theoretical work and potential applications of this fascinating type of acoustic waves are presented.
Silicon edges as one-dimensional waveguides for dispersion-free and supersonic leaky wedge waves
(2012)
Acoustic waves guided by the cleaved edge of a Si(111) crystal were studied using a laser-based angle-tunable transducer for selectively launching isolated wedge or surface modes. A supersonic leaky wedge wave and the fundamental wedge wave were observed experimentally and confirmed theoretically. Coupling of the supersonic wave to shear waves is discussed, and its leakage into the surface acoustic wave was observed directly. The velocity and penetration depth of the wedge waves were determined by contact-free optical probing. Thus, a detailed experimental and theoretical study of linear one-dimensional guided modes in silicon is presented.
In numerical calculations, guided acoustic waves, localized in two spatial dimensions, have been shown to exist and their properties have been investigated in three different geometries, (i) a half-space consisting of two elastic media with a planar interface inclined to the common surface, (ii) a wedge made of two elastic media with a planar interface, and (iii) the free edge of an elastic layer between two quarter-spaces or two wedge-shaped pieces of a material with elastic properties and density differing from those of the intermediate layer.
For the special case of Poisson media forming systems (i) and (ii), the existence ranges of these 1D guided waves in parameter space have been determined and found to strongly depend on the inclination angle between surface and interface in case (i) and the wedge angle in case (ii). In a system of type (ii) made of two materials with strong acoustic mismatch and in systems of type (iii), leaky waves have been found with a high degree of spatial localization of the associated displacements, although the two materials constituting these structures are isotropic.
Both the fully guided and the leaky waves analyzed in this work could find applications in non-destructive evaluation of composite structures and should be accounted for in geophysical prospecting, for example.
A critical comparison is presented of the two computational approaches employed, namely a semi-analytical finite element scheme and a method based on an expansion of the displacement field in a double series of special functions.
In a SAW device comprises a SAW chip bearing a SAW transducer arranged within a first signal line parasitic signals due to higher harmonics of the operating frequency of the SAW devices are electrically eliminated by compensating means comprising at least one second signal line having means for producing a cancelling signal different in sign or phase to the parasitic signal, or a shunt line to electrically connect the SAW transducer to a back side metallization of the SAW chip.