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This work focuses on the dependencies between typical design parameters of surface acoustic wave (SAW) resonators and the nonlinear emitted signals of second and third order. The parameters metalization ratio and pitch are used as examples, but the approach can be extended to other design parameters as well. It is shown, that the interaction between the nonlinear current generation and the linear admittance is defining the measured nonlinear power signals. It is also discussed, that changes in linear properties get more pronounced in nonlinear responses. Therefore, slight effects on linear parameters will have significant influence on the observed nonlinearity.
Nonlinear acoustic waves are considered that have displacements localized at the tip of an elastic wedge. The evolution equation governing their propagation is discussed and compared with its analogues pertaining to nonlinear acoustic surface and bulk waves. Solitary wave solutions of the evolution equation have been determined numerically for the cases of two rectangular edges which may be viewed as generated by splitting a half-space, consisting of crystalline silicon, into two quarter-spaces. For these two geometries, the kernel in the nonlinear terms of the evolution equation has been calculated from the second-order and third-order elastic constants of silicon, and weak dispersion due to tip truncation has been considered. Solitary pulse shapes have been computed and collisions of solitary pulses have been simulated for various relative speeds of the two collision partners. Collision scenarios for the two wedge geometries were found to differ considerably. Special attention is paid to the peculiar interaction of two initially identical solitary pulses.
Increasing power density causes increased self-generation of harmonics and intermodulation. As this leads to violations of the strict linearity requirements, especially for carrier aggregation (CA), the nonlinearity must be considered in the design process of RF devices. This raises the demand of accurate simulation models. Linear and nonlinear P-Matrix/COM models are used during the design due to their fast simulation times and accurate results. However, the finite element method (FEM) is useful to get a deeper insight in the device's nonlinearities, as the total field distributions can be visualized. The FE method requires complete sets of material tensors, which are unknown for most relevant materials in nonlinear micro-acoustics. In this work, we perform nonlinear FEM simulations, which allow the calculation of nonlinear field distributions of a lithium tantalate based layered SAW system up to third order. We aim at achieving good correspondence to measured data and determine the contributions of each material layer to the nonlinear signals. Therefore, we use approximations circumventing the issue of limited higher order tensor data. Experimental data for the third order nonlinearity is shown to validate the presented approach.
Laser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the measurements. Results for their dependence on the Sc content are presented and compared to corresponding data in the literature, obtained by alternative experimental methods or by ab-initio calculations.
A Nonlinear FEM Model to Calculate Third-Order Harmonic and Intermodulation in TC-SAW Devices
(2018)
Nonlinearities in Temperature Compensated SAW (TC-SAW) devices in the 2 GHz range are investigated using a nonlinear finite element model by simultaneously considering both third-order intermodulation distortion (IMD3)and third harmonic (H3). In the employed perturbation approach, different contributions to the total H3, the direct and indirect contribution, are discussed. H3 and IMD3 measurements were fitted simultaneously using scaling factors for SiO 2 film and Cu electrode nonlinear material tensors in TC-SAW devices. We employ a P-Matrix simulation as intermediate step: Firstly, measurement and nonlinear P-Matrix calculations for finite devices are compared and coefficients of the P-Matrix simulation are determined. The nonlinear tensor data of the different materials involved in periodic nonlinear finite element method (FEM) computations are optimized to fit periodic P-Matrix calculations by introducing scaling factors. Thus, the contribution of different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of materials is discussed.
Existing ultrasonic stress evaluation methods utilize the acoustoelastic effect for bulk waves propagating in volume, which is unsuitable for a surface treated material, possessing a significant variation in material properties with depth. With knowledge of nonlinear elastic parameters – third-order elastic constants (TOEC) close to the surface of the sample, the acoustoelastic effect might be used with surface acoustic waves. This work is focused on the development of an independent method of TOEC measurement using the effect of nonlinear surface acoustic waves scattering – i.e. the effect of elastic waves interaction in a nonlinear medium.
In this paper, the possible three wave interactions of surface guided waves and bulk waves are described and formulae for the efficiency of harmonic generation and mode mixing are derived. A comparison of the efficiency of surface waves scattering in an isotropic medium for different interaction types is carried out with the help of nonlinear perturbation theory. First results for surface and bulk wave mixing with known second- and third-order elastic constants are shown.
The growing complexity in RF front-ends, which support carrier aggregation and a growing number of frequency bands, leads to tightened nonlinearity requirements in all sub-components. The generation of third order intermodulation products (IMD3) are typical problems caused by the non-linearity of SAW devices. In the present work, we investigate temperature compensating (TC) SAW devices on Lithium Niobate-rot128YX. An accurate FEM simulation model [1] is employed, which allows to better understand the origin of nonlinearities in such acoustic devices.
Elastic constants of components are usually determined by tensile tests in combination with ultrasonic experiments. However, these properties may change due to e.g. mechanical treatments or service conditions during their lifetime. Knowledge of the actual material parameters is key to the determination of quantities like residual stresses present in the medium. In this work the acoustic nonlinearity parameter (ANP) for surface acoustic waves is examined through the derivation of an evolution equation for the amplitude of the second harmonic. Given a certain depth profile of the third-order elastic constants, the dependence of the ANP with respect to the input frequency is determined and on the basis of these results, an appropriate inversion method is developed. This method is intended for the extraction of the depth dependence of the third-order elastic constants of the material from second-harmonic generation and guided wave mixing experiments, assuming that the change in the linear Rayleigh wave velocity is small. The latter assumption is supported by a 3D-FEM model study of a medium with randomly distributed microcracks as well as theoretical works on this topic in the literature.
Zerstörungsfreie Verfahren zur Messung von Eigenspannungen erfordern, abhängig vom gewählten Verfahren, die Kenntnis gewisser Kopplungskonstanten. Im Falle von Ultraschallmessverfahren sind das neben den elastischen Konstanten zweiter Ordnung (SOEC) vor allem die Konstanten dritter Ordnung (TOEC). Elastische Konstanten fester, metallischer Bauteile werden in der Regel in Zugversuchen bestimmt. Zur Ermittlung der TOEC werden diese mit Ultraschallmessmethoden kombiniert. Durch äußere Einflüsse, wie etwa mechanische Nachbehandlungen der zu untersuchenden Bauteile können sich diese Konstanten jedoch ändern und müssen folglich direkt am veränderten Material bestimmt werden. Mithilfe von Simulationen wird die Ausbreitung der zweiten Harmonischen und der nichtlinear erzeugten Oberflächenwellen in Wellenmischexperimenten analysiert und der akustische Nichtlinearitätsparameter (ANP) bzw. der Kopplungsparameter aus der Amplitudenentwicklung berechnet. Insbesondere wird untersucht, welchen Einfluss ein gegebenes Tiefenprofil der TOEC auf den ANP hat (Vorwärtsproblem) und inwiefern sich aus den Messungen des ANP auf ein vorliegendes Tiefenprofil der TOEC schließen lässt (inverses Problem). Außerdem wird diskutiert, welchen Einfluss lokale Änderungen der SOEC auf den ANP haben können und wie groß diese Änderungen sein dürfen, um die TOEC dennoch bestimmen zu können. Die Untersuchungen hierzu wurden auf der Basis eines 3D-FEM Modells mit zufällig orientierten Mikrorissen durchgeführt. Die numerischen Rechnungen zeigen dabei auch eine gute Übereinstimmung mit einem aus der Literatur bekannten und für dieses Problem erweiterten, analytischen Modell. Neben der rissinduzierten Nichtlinearität kann bei diesem auch die Gitternichtlinearität berücksichtigt werden.