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Propagation of acoustic waves is considered in a system consisting of two stiff quarter-spaces connected by a planar soft layer. The two quarter-spaces and the layer form a half-space with a planar surface. In a numerical study, surface waves have been found and analyzed in this system with displacements that are localized not only at the surface, but also in the soft layer. In addition to the semi-analytical finite element method, an alternative approach based on an expansion of the displacement field in a double series of Laguerre functions and Legendre polynomials has been applied.
It is shown that a number of branches of the mode spectrum can be interpreted and remarkably well described by perturbation theory, where the zero-order modes are the wedge waves guided at a rectangular edge of the stiff quarter-spaces or waves guided at the edge of a soft plate with rigid surfaces.
For elastic moduli and densities corresponding to the material combination PMMA–silicone–PMMA, at least one of the branches in the dispersion relation of surface waves trapped in the soft layer exhibits a zero-group velocity point.
Potential applications of these 1D guided surface waves in non-destructive evaluation are discussed.
Properties of higher-order surface acoustic wave modes in Al(1-x)Sc(x)N / sapphire structures
(2021)
In this work, surface acoustic wave (SAW) modes and their dependence on propagation directions in epitaxial Al0.68Sc0.32N(0001) films on Al2O3(0001) substrates were studied using numerical and experimental methods. In order to find optimal propagation directions for higher-order SAW modes, phase velocity dispersion branches of Al0.68Sc0.32N on Al2O3 with Pt mass loading were computed for the propagation directions <11-20> and <1-100> with respect to the substrate. Experimental investigations of phase velocities and electromechanical coupling were performed for comparison with the numerical results. Simulations carried out with the finite element method (FEM) and with a Green function approach allowed identification of each wave type, including Rayleigh, Sezawa and shear horizontal wave modes. For the propagation direction <1-100>, significantly increased wave guidance of the Sezawa mode compared to other directions was observed, resulting in enhanced electromechanical coupling (k2eff = 1.6 %) and phase velocity (vphase = 6 km/s). We demonstrated, that selecting wave propagation in <1-100> with high mass density electrodes results in increased electromechanical coupling without significant reduction in phase velocities for the Sezawa wave mode. An improved combination of metallization, Sc concentration x, and SAW propagation direction is suggested which exhibits both high electromechanical coupling (k2eff > 6 %) and high velocity (vphase = 5.5 km/s) for the Sezawa mode.