Refine
Year of publication
- 2014 (1)
Document Type
- Patent (1)
Language
- English (1)
Has Fulltext
- no (1)
Is part of the Bibliography
- yes (1)
Institute
Open Access
- Open Access (1)
The invention relates to the field of transporting flat substrates such as silicon substrates. In particular, the invention relates to particularly protective and continuous transport of such substrates. The method according to the invention is used to transport a vertically aligned flat substrate (1) comprising two flat sides in a transport direction inside a transport channel (2) that is at least partially filled with a liquid medium (F), wherein said liquid medium (F) flows against at least one of the flat sides of the substrate (1) and has a supporting component, which lifts the sum of the weight and buoyancy force of the substrate (1), and an advancing component, which is directed in the transport direction, so that the substrate (1) is supported and transported without mechanical aids. The device according to the invention comprises a transport channel (2) for accommodating a liquid medium (F) and a substrate (1) to be guided in vertical alignment within said medium (F), wherein the transport channel (2) has inflow openings (5) in the walls (3, 4).