Open Access

Elastic moduli of scandium nitride (ScN) films are determined using a laser-based experimental method working with surface acoustic waves (SAWs). ScN, a semiconductor material with promising potential for various applications, crystallizes in the cubic rock salt (rs) structure. We investigate two samples of high-crystallinity ScN(111) films with thicknesses ∼200 and ∼300 nm, grown on Si(111) substrates by pulsed DC-magnetron co-sputtering and a sample with a fiber-textured ScN film (∼800 nm) on Si(001). From the shape evolution of laser-generated acoustic pulses, SAW dispersion curves were obtained in a frequency range of 50–500 MHz. In order to take advantage of the anisotropy of the film and substrate materials, measurements were performed for 10–15 SAW wavevector directions, which could be defined with a precision of 0.2°. Using perturbation theory with respect to the ratio of film thickness and SAW wavelength, two combinations of the three independent elastic constants of the high-crystallinity rs ScN films could be extracted from the measurement data. The surface roughness of the ScN films is accounted for with a simple model. Complete sets of the three elastic moduli were inferred in two different ways: (i) SAW dispersion data for the third sample were included in the extraction procedure; and (ii) the bulk modulus is set equal to a theoretical literature value. The extracted values for the three elastic constants are at variance with published theoretical results for single-crystal ScN. Possible reasons for these discrepancies are discussed.

In this work, surface acoustic wave (SAW) modes and their dependence on propagation directions in epitaxial Al0.68Sc0.32N(0001) films on Al2O3(0001) substrates were studied using numerical and experimental methods. In order to find optimal propagation directions for higher-order SAW modes, phase velocity dispersion branches of Al0.68Sc0.32N on Al2O3 with Pt mass loading were computed for the propagation directions <11-20> and <1-100> with respect to the substrate. Experimental investigations of phase velocities and electromechanical coupling were performed for comparison with the numerical results. Simulations carried out with the finite element method (FEM) and with a Green function approach allowed identification of each wave type, including Rayleigh, Sezawa and shear horizontal wave modes. For the propagation direction <1-100>, significantly increased wave guidance of the Sezawa mode compared to other directions was observed, resulting in enhanced electromechanical coupling (k2eff = 1.6 %) and phase velocity (vphase = 6 km/s). We demonstrated, that selecting wave propagation in <1-100> with high mass density electrodes results in increased electromechanical coupling without significant reduction in phase velocities for the Sezawa wave mode. An improved combination of metallization, Sc concentration x, and SAW propagation direction is suggested which exhibits both high electromechanical coupling (k2eff > 6 %) and high velocity (vphase = 5.5 km/s) for the Sezawa mode.