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In the framework of electro-elasticity theory and the finite element method (FEM), a model is set up for the computation of quantities in surface acoustic wave (SAW) devices accounting for nonlinear effects. These include second-order and third-order intermodulations, second and third harmonic generation and the influence of electro-acoustic nonlinearity on the frequency characteristics of SAW resonators. The model is based on perturbation theory, and requires input material constants, e.g., the elastic moduli up to fourth order for all materials involved. The model is two-dimensional, corresponding to an infinite aperture, but all three Cartesian components of the displacement and electrical fields are accounted for. The first version of the model pertains to an infinite periodic arrangement of electrodes. It is subsequently generalized to systems with a finite number of electrodes. For the latter version, a recursive algorithm is presented which is related to the cascading scheme of Plessky and Koskela and strongly reduces computation time and memory requirements. The model is applied to TC-SAW systems with copper electrodes buried in an oxide film on a LiNbO3 substrate. Results of computations are presented for the electrical current due to third-order intermodulations and the displacement field associated with the second harmonic and second-order intermodulations, generated by monochromatic input tones. The scope of this review is limited to methodological aspects with the goal to enable calculations of nonlinear quantities in SAW devices on inexpensive and easily accessible computing platforms.
In this work the nonlinear behavior of layered surface acoustic wave (SAW) resonators is studied with the help of finite element (FE) computations. The full calculations depend strongly on the availability of accurate tensor data. While there are accurate material data for linear computations, the complete sets of higher-order material constants, needed for nonlinear simulations, are still not available for relevant materials. To overcome this problem, scaling factors were used for each available nonlinear tensor. The approach here considers piezoelectricity, dielectricity, electrostriction, and elasticity constants up to the fourth order. These factors act as a phenomenological estimate for incomplete tensor data. Since no set of fourth-order material constants for LiTaO3 is available, an isotropic approximation for the fourth-order elastic constants was applied. As a result, it was found that the fourth-order elastic tensor is dominated by one-fourth order Lamé constant. With the help of the FE model, derived in two different, but equivalent ways, we investigate the nonlinear behavior of a SAW resonator with a layered material stack. The focus was set to third-order nonlinearity. Accordingly, the modeling approach is validated using measurements of third-order effects in test resonators. In addition, the acoustic field distribution is analyzed.
The laser ultrasound (LU) technique has been used to determine dispersion curves for surface acoustic waves (SAW) propagating in AlScN/Al2O3 systems. Polar and non-polar Al0.77Sc0.23N thin films were prepared by magnetron sputter epitaxy on Al2O3 substrates and coated with a metal layer. SAW dispersion curves have been measured for various propagation directions on the surface. This is easily achieved in LU measurements since no additional surface structures need to be fabricated, which would be required if elastic properties are determined with the help of SAW resonators. Variation of the propagation direction allows for efficient use of the system’s anisotropy when extracting information on elastic properties. This helps to overcome the complexity caused by a large number of elastic constants in the film material. An analysis of the sensitivity of the SAW phase velocities (with respect to the elastic moduli and their dependence on SAW propagation direction) reveals that the non-polar AlScN films are particularly well suited for the extraction of elastic film properties. Good agreement is found between experiment and theoretical predictions, validating LU as a non-destructive and fast technique for the determination of elastic constants of piezoelectric thin films.
Surface treatment intensity monitoring is still an open and challenging nondestructive testing problem. For the estimation of residual stress with ultrasonic measurements, local linear and nonlinear elastic constants are needed as input. In this paper, nonlinear elastic-wave interactions (also called wave mixing or scattering) — namely, the generation of secondary ultrasonic waves in a nonlinear medium — are considered as a prospective means for near-surface nonlinear elastic parameter evaluation. The allowed interactions between bulk and surface waves, as well as the dependence of the scattering efficiency on the frequency and angle between source waves, were investigated through an analytical model, then compared with FEM simulations and experimental results. Finally, possible future steps for the development of the applied methods for the determination of near-surface higher-order elastic constants are discussed. In addition, several problem-relevant data processing procedures are presented.
Acoustic waves are investigated which are guided at the edge (apex line) of a wedge-shaped elastic body or at the edge of an elastic plate. The edges contain a periodic sequence of modifications, consisting either of indentations or inclusions with a different elastic material which gives rise to high acoustic mismatch. Dispersion relations are computed with the help of the finite element method. They exhibit zero-group velocity points on the dispersion branches of edge-localized acoustic modes. These special points also occur at Bloch-Floquet wavenumbers away from the Brillouin zone boundary. Deep indentations lead to flat branches corresponding to largely non-interacting, Einstein-oscillator like vibrations of the tongues between the grooves of the periodic structure. Due to the nonlinearity of the elastic media, quantified by their third-order elastic constants, an acoustic mode localized at a periodically modified edge generates a second harmonic which partly consists of surface and plate modes propagating into the elastic medium in the direction vertical to the edge. This acoustic radiation at the second-harmonic frequency is investigated for an elastic plate and a truncated sharp-angle wedge with periodic inclusions at their edges. Unlike nonlinear bulk wave generation by surface acoustic waves in an interdigital structure, surface and plate mode radiation by edge-localized modes can be visualized directly in laser-ultrasound experiments.
Surface acoustic waves are propagated toward the edge of an anisotropic elastic medium (a silicon crystal), which supports leaky waves with a high degree of localization at the tip of the edge. At an angle of incidence corresponding to phase matching with this leaky wedge wave, a sharp peak in the reflection coefficient of the surface wave was found. This anomalous reflection is associated with efficient excitation of the leaky wedge wave. In laser ultrasound experiments, surface acoustic wave pulses were excited and their reflection from the edge of the sample and their partial conversion into leaky wedge wave pulses was observed by optical probe-beam deflection. The reflection scenario and the pulse shapes of the surface and wedge-localized guided waves, including the evolution of the acoustic pulse traveling along the edge, have been confirmed in detail by numerical simulations.
Propagation of acoustic waves is considered in a system consisting of two stiff quarter-spaces connected by a planar soft layer. The two quarter-spaces and the layer form a half-space with a planar surface. In a numerical study, surface waves have been found and analyzed in this system with displacements that are localized not only at the surface, but also in the soft layer. In addition to the semi-analytical finite element method, an alternative approach based on an expansion of the displacement field in a double series of Laguerre functions and Legendre polynomials has been applied.
It is shown that a number of branches of the mode spectrum can be interpreted and remarkably well described by perturbation theory, where the zero-order modes are the wedge waves guided at a rectangular edge of the stiff quarter-spaces or waves guided at the edge of a soft plate with rigid surfaces.
For elastic moduli and densities corresponding to the material combination PMMA–silicone–PMMA, at least one of the branches in the dispersion relation of surface waves trapped in the soft layer exhibits a zero-group velocity point.
Potential applications of these 1D guided surface waves in non-destructive evaluation are discussed.
In numerical calculations, guided acoustic waves, localized in two spatial dimensions, have been shown to exist and their properties have been investigated in three different geometries, (i) a half-space consisting of two elastic media with a planar interface inclined to the common surface, (ii) a wedge made of two elastic media with a planar interface, and (iii) the free edge of an elastic layer between two quarter-spaces or two wedge-shaped pieces of a material with elastic properties and density differing from those of the intermediate layer.
For the special case of Poisson media forming systems (i) and (ii), the existence ranges of these 1D guided waves in parameter space have been determined and found to strongly depend on the inclination angle between surface and interface in case (i) and the wedge angle in case (ii). In a system of type (ii) made of two materials with strong acoustic mismatch and in systems of type (iii), leaky waves have been found with a high degree of spatial localization of the associated displacements, although the two materials constituting these structures are isotropic.
Both the fully guided and the leaky waves analyzed in this work could find applications in non-destructive evaluation of composite structures and should be accounted for in geophysical prospecting, for example.
A critical comparison is presented of the two computational approaches employed, namely a semi-analytical finite element scheme and a method based on an expansion of the displacement field in a double series of special functions.
For an elastic medium containing a homogeneous distribution of micro-cracks, an effective one-dimensional stress-strain relation has been determined with finite element simulations. In addition to flat micro-cracks, voids were considered that contain a Hertzian contact, which represents an example for micro-cracks with internal structure. The orientation of both types of micro-cracks was fully aligned or, for flat micro-cracks, totally random. For micro-cracks with Hertzian contacts, the case of random orientation was treated in an approximate way. The two types of defects were found to give rise to different degrees of non-analytic behavior of the effective stress-strain relation, which governs the nonlinear propagation of symmetric (S0) Lamb waves in the long-wavelength limit. The presence of flat micro-cracks causes even harmonics to grow linearly with propagation distance with amplitudes proportional to the amplitude of the fundamental wave, and gives rise to a static strain. The presence of the second type of defects leads to a linear growth of all harmonics with amplitudes proportional to the power 3/2 of the fundamental amplitude, and to a strain-dependent velocity shift. Simple expressions are given for the growth rates of higher harmonics of S0 Lamb waves in terms of the parameters occurring in the effective stress-strain relation. They have partly been determined quantitatively with the help of the FEM results for different micro-crack concentrations.
Nonlinearity can give rise to intermodulation distortions in surface acoustic wave (SAW) devices operating at high input power levels. To understand such undesired effects, a finite element method (FEM) simulation model in combination with a perturbation theory is applied to find out the role of different materials and higher order nonlinear tensor data for the nonlinearities in such acoustic devices. At high power, the SAW devices containing metal, piezoelectric substrate, and temperature compensating (TC) layers are subject to complicated geometrical, material, and other nonlinearities. In this paper, third-order nonlinearities in TC-SAW devices are investigated. The materials used are LiNbO 3 -rot128YX as the substrate and copper electrodes covered with a SiO 2 film as the TC layer. An effective nonlinearity constant for a given system is determined by comparison of nonlinear P-matrix simulations to third-order intermodulation measurements of test filters in a first step. By employing these constants from different systems, i.e., different metallization ratios, in nonlinear periodic P-matrix simulations, a direct comparison to nonlinear periodic FEM-simulations yields scaling factors for the materials used. Thus, the contribution of the different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of metal electrodes, substrate, and TC film are discussed in detail.
The existence of acoustic waves with displacements localized at the tip of an isotropic elastic wedge was rigorously proven by Kamotskii, Zavorokhin and Nazarov. This proof, which is based on a variational approach, is extended to rectangular anisotropic wedges. For two high-symmetry configurations of rectangular edges in elastic media with tetragonal symmetry, a criterion is derived that allows identifying the boundary between the regions of existence for wedge modes of even and odd symmetry in regions of parameter space, where even- and odd-symmetry modes do not exist simultaneously. Furthermore, rectangular edges with non-equivalent surfaces are analyzed, and it is shown that at rectangular edges of cubic elastic media with one (110) surface and one (001) surface, a tip-localized guided wave always exists, apart from special cases that are characterized.
Laser pulses focused near the tip of an elastic wedge generate acoustic waves guided at its apex. The shapes of the acoustic wedge wave pulses depend on the energy and the profile of the exciting laser pulse and on the anisotropy of the elastic medium the wedge is made of. Expressions for the acoustic pulse shapes have been derived in terms of the modal displacement fields of wedge waves for laser excitation in the thermo-elastic regime and for excitation via a pressure pulse exerted on the surface. The physical quantity considered is the local inclination of a surface of the wedge, which is measured optically by laser-probe-beam deflection. Experimental results on pulse shapes in the thermo-elastic regime are presented and confirmed by numerical calculations. They pertain to an isotropic sharp-angle wedge with two wedge-wave branches and to a non-reciprocity phenomenon at rectangular silicon edges.
A laser-operated, angle-tunable transducer was employed to excite selectively elastic waves guided along the apex of a solid wedge. The propagation of wedge waves at anisotropic monocrystalline silicon edges with different symmetry properties was studied by optical detection. The reduced symmetry in crystals, as compared to isotropic media, causes a number of new features, such as the existence of supersonic leaky wedge waves, tilted spatial pulse profiles, and other peculiarities of their localization. Experimental and theoretical results are presented for three different types of symmetry configurations: the wedge symmetric about its midplane, the wedge symmetric about the plane normal to its apex line, and the wedge symmetric about one of its faces. The experiments include accurate measurements of the phase velocity and the wave field distribution, providing information on localization and coupling of wedge waves with other waves. Theoretically, the wedge waves were treated by the Laguerre function method, extended to modes that are not localized at the tip of the wedge. This approach allowed an accurate description of the observed localized and leaky wedge waves in anisotropic wedges.
The characteristic features and applications of linear and nonlinear guided elastic waves propagating along surfaces (2D) and wedges (1D) are discussed. Laser-based excitation, detection, or contact-free analysis of these guided waves with pump–probe methods are reviewed. Determination of material parameters by broadband surface acoustic waves (SAWs) and other applications in nondestructive evaluation (NDE) are considered. The realization of nonlinear SAWs in the form of solitary waves and as shock waves, used for the determination of the fracture strength, is described. The unique properties of dispersion-free wedge waves (WWs) propagating along homogeneous wedges and of dispersive wedge waves observed in the presence of wedge modifications such as tip truncation or coatings are outlined. Theoretical and experimental results on nonlinear wedge waves in isotropic and anisotropic solids are presented.