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The growing complexity in RF front-ends, which support carrier aggregation and a growing number of frequency bands, leads to tightened nonlinearity requirements in all sub-components. The generation of third order intermodulation products (IMD3) are typical problems caused by the non-linearity of SAW devices. In the present work, we investigate temperature compensating (TC) SAW devices on Lithium Niobate-rot128YX. An accurate FEM simulation model [1] is employed, which allows to better understand the origin of nonlinearities in such acoustic devices.
Increasing power density causes increased self-generation of harmonics and intermodulation. As this leads to violations of the strict linearity requirements, especially for carrier aggregation (CA), the nonlinearity must be considered in the design process of RF devices. This raises the demand of accurate simulation models. Linear and nonlinear P-Matrix/COM models are used during the design due to their fast simulation times and accurate results. However, the finite element method (FEM) is useful to get a deeper insight in the device's nonlinearities, as the total field distributions can be visualized. The FE method requires complete sets of material tensors, which are unknown for most relevant materials in nonlinear micro-acoustics. In this work, we perform nonlinear FEM simulations, which allow the calculation of nonlinear field distributions of a lithium tantalate based layered SAW system up to third order. We aim at achieving good correspondence to measured data and determine the contributions of each material layer to the nonlinear signals. Therefore, we use approximations circumventing the issue of limited higher order tensor data. Experimental data for the third order nonlinearity is shown to validate the presented approach.
The characteristic features and applications of linear and nonlinear guided elastic waves propagating along surfaces (2D) and wedges (1D) are discussed. Laser-based excitation, detection, or contact-free analysis of these guided waves with pump–probe methods are reviewed. Determination of material parameters by broadband surface acoustic waves (SAWs) and other applications in nondestructive evaluation (NDE) are considered. The realization of nonlinear SAWs in the form of solitary waves and as shock waves, used for the determination of the fracture strength, is described. The unique properties of dispersion-free wedge waves (WWs) propagating along homogeneous wedges and of dispersive wedge waves observed in the presence of wedge modifications such as tip truncation or coatings are outlined. Theoretical and experimental results on nonlinear wedge waves in isotropic and anisotropic solids are presented.
A theoretical description is given for the propagation of surface acoustic wave pulses in anisotropic elastic media subject to the influence of nonlinearity. On the basis of nonlinear elasticity theory, an evolution equation is presented for the surface slope or the longitudinal surface velocity associated with an acoustic pulse. It contains a non-local nonlinearity, characterized by a kernel that strongly varies from one propagation geometry to another due to the anisotropy of the substrate. It governs pulse shape evolution in homogeneous halfspaces and the shapes of solitary surface pulses that exist in coated substrates. The theory describing nonlinear Rayleigh-type surface acoustic waves is extended in a straightforward way to surface waves that are localized at a one-dimensional acoustic waveguide like elastic wedges.
Surface and interface acoustic waves are two-dimensionally guided waves, as their displacement field is plane-wave like regarding its dependence on the spatial coordinates parallel to the guiding plane, while it decays exponentially along the axis normal to that plane. When propagating at the planar surface or interface of homogeneous media, they are non-dispersive. Another type of non-dispersive acoustic waves which is, however, one-dimensionally guided, has displacement fields localized near the apex of a wedge made of an elastic material. In this short review, their propagation properties are described as well as theoretical and experimental methods which have been used for their analysis. Experimental findings are discussed in comparison with corresponding theoretical work and potential applications of this fascinating type of acoustic waves are presented.
In a recent paper it has been shown that the effective nonlinear constant which is used in a P-Matrix approach to describe third-order intermodulation (IMD3) in surface acoustic wave (SAW) devices can be obtained from finite element (FEM) calculations of a periodic cell using nonlinear tensor data [1]. In this paper we extend this FEM calculation and show that the IMD3 of an infinite periodic array of electrodes on a piezoelectric substrate can be directly simulated in the sagittal plane. This direct approach opens the way for a FEM based simulation of nonlinearities for finite and generalized structures avoiding the simplifications of phenomenological approaches.
Laser pulses focused near the tip of an elastic wedge generate acoustic waves guided at its apex. The shapes of the acoustic wedge wave pulses depend on the energy and the profile of the exciting laser pulse and on the anisotropy of the elastic medium the wedge is made of. Expressions for the acoustic pulse shapes have been derived in terms of the modal displacement fields of wedge waves for laser excitation in the thermo-elastic regime and for excitation via a pressure pulse exerted on the surface. The physical quantity considered is the local inclination of a surface of the wedge, which is measured optically by laser-probe-beam deflection. Experimental results on pulse shapes in the thermo-elastic regime are presented and confirmed by numerical calculations. They pertain to an isotropic sharp-angle wedge with two wedge-wave branches and to a non-reciprocity phenomenon at rectangular silicon edges.
Recently a P-matrix and COM formalism was presented, which predicts third order intermodulation (IMD3) and triple beat with good accuracy and needs only a single nonlinearity constant. This formalism describes frequency dependence correctly. In this work the dependence of this nonlinearity constant on metalization ratio is investigated for aluminum metalization on LiTaO 3 (YXl)/42°. By comparison to test devices the nonlinearity constant is shown to be largely independent of metalization ratio. The nonlinear effect, however, strongly depends on metalization ratio, which is well described by the model. The linearity of a duplexer is optimized by reduction of metalization ratio and redesign of Tx branch topology.
Surface acoustic waves are propagated toward the edge of an anisotropic elastic medium (a silicon crystal), which supports leaky waves with a high degree of localization at the tip of the edge. At an angle of incidence corresponding to phase matching with this leaky wedge wave, a sharp peak in the reflection coefficient of the surface wave was found. This anomalous reflection is associated with efficient excitation of the leaky wedge wave. In laser ultrasound experiments, surface acoustic wave pulses were excited and their reflection from the edge of the sample and their partial conversion into leaky wedge wave pulses was observed by optical probe-beam deflection. The reflection scenario and the pulse shapes of the surface and wedge-localized guided waves, including the evolution of the acoustic pulse traveling along the edge, have been confirmed in detail by numerical simulations.
Among the various types of guided acoustic waves, acoustic wedge waves are non-diffractive and non-dispersive. Both properties make them susceptible to nonlinear effects. Investigations have recently been focused on effects of second-order nonlinearity in connection with anisotropy. The current status of these investigations is reviewed in the context of earlier work on nonlinear properties of two-dimensional guided acoustic waves, in particular surface waves. The role of weak dispersion, leading to solitary waves, is also discussed. For anti-symmetric flexural wedge waves propagating in isotropic media or in anisotropic media with reflection symmetry with respect to the wedge’s mid-plane, an evolution equation is derived that accounts for an effective third-order nonlinearity of acoustic wedge waves. For the kernel functions occurring in the nonlinear terms of this equation, expressions in terms of overlap integrals with Laguerre functions are provided, which allow for their quantitative numerical evaluation. First numerical results for the efficiency of third-harmonic generation of flexural wedge waves are presented.