Refine
Document Type
Conference Type
- Konferenzartikel (3)
Language
- English (3)
Has Fulltext
- no (3)
Is part of the Bibliography
- yes (3)
Keywords
- Substrates (2)
- Equations (1)
- Finite element analysis (1)
- Harmonic analysis (1)
- Lithium compounds (1)
- Lithium niobate (1)
- Mathematical model (1)
- Metallization (1)
- Surface acoustic waves (1)
Institute
Open Access
- Closed (3) (remove)
A Nonlinear FEM Model to Calculate Third-Order Harmonic and Intermodulation in TC-SAW Devices
(2018)
Nonlinearities in Temperature Compensated SAW (TC-SAW) devices in the 2 GHz range are investigated using a nonlinear finite element model by simultaneously considering both third-order intermodulation distortion (IMD3)and third harmonic (H3). In the employed perturbation approach, different contributions to the total H3, the direct and indirect contribution, are discussed. H3 and IMD3 measurements were fitted simultaneously using scaling factors for SiO 2 film and Cu electrode nonlinear material tensors in TC-SAW devices. We employ a P-Matrix simulation as intermediate step: Firstly, measurement and nonlinear P-Matrix calculations for finite devices are compared and coefficients of the P-Matrix simulation are determined. The nonlinear tensor data of the different materials involved in periodic nonlinear finite element method (FEM) computations are optimized to fit periodic P-Matrix calculations by introducing scaling factors. Thus, the contribution of different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of materials is discussed.
In this work a set of nonlinear coupled COM equations at interacting frequencies is derived on the basis of nonlinear electro-elasticity. The formalism is presented with the aim of describing intermodulation distortion of third-order (IMD3) and triple beat. The resulting COM equations are translated to the P-matrix formalism, where care is taken to obtain the correct frequency dependence. The scheme depends on two frequency-independent constants for an effective third-order nonlinearity. One of these two constants is negligibly small in the systems considered here. The P-matrix approach is applied to single filters and duplexers on LiTaO 3 (YXl)/42° operating in different frequency ranges. Both IMD3 and triple beat show good agreement with measurement.
In the present work, nonlinearities in temperature compensating (TC) SAW devices are investigated. The materials used are LiNbO₃-rot128YX as the substrate and Copper electrodes covered with a SiO₂-layer as the compensating layer. In order to understand the role of these materials for the nonlinearities in such acoustic devices, a FEM simulation model in combination with a perturbation approach is applied. The nonlinear tensor data of the different materials involved in TC-SAW devices have been taken from literature, but were partially modified to fit experimental data by introducing scaling factors. An effective nonlinearity constant is determined by comparison of nonlinear P-matrix simulations to IMD3 measurements of test filters. By employing these constants in nonlinear periodic P-matrix simulations a direct comparison to nonlinear periodic FEM-simulations yields the scaling factors for the material used. Thus, the contribution of different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of metal electrodes is discussed in detail.