Determining Elastic Constants of AlScN Films on Silicon Substrates by Laser Ultrasonics
- Laser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the measurements. Results for their dependence on the Sc content are presented and compared toLaser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the measurements. Results for their dependence on the Sc content are presented and compared to corresponding data in the literature, obtained by alternative experimental methods or by ab-initio calculations.…
| Document Type: | Conference Proceeding |
|---|---|
| Conference Type: | Konferenzartikel |
| Zitierlink: | https://opus.hs-offenburg.de/4530 | Bibliografische Angaben |
| Title (English): | Determining Elastic Constants of AlScN Films on Silicon Substrates by Laser Ultrasonics |
| Conference: | 2020 IEEE International Ultrasonics Symposium (IUS), 7-11 Sept. 2020, Las Vegas, NV, USA |
| Author: | Olga Rogall , Niclas M. Feil, Anli Ding, Elena MayerStaff MemberORCiD, Pavel Dmitrievich PupyrevStaff MemberORCiDGND, Alexey M. LomonosovStaff MemberORCiDGND, Agnė Žukauskaitė, Oliver Ambacher, Andreas MayerStaff MemberORCiDGND |
| Year of Publication: | 2020 |
| Publisher: | IEEE |
| First Page: | 1 |
| Last Page: | 4 |
| Parent Title (English): | 2020 Symposium Proceedings |
| ISBN: | 978-1-7281-5448-0 (digital) |
| ISBN: | 978-1-7281-5449-7 (Print on Demand) |
| ISSN: | 1948-5727 (digital) |
| ISSN: | 1948-5719 (Print on Demand) |
| DOI: | https://doi.org/10.1109/IUS46767.2020.9251632 |
| Language: | English | Inhaltliche Informationen |
| Institutes: | Fakultät Wirtschaft (W) |
| Collections of the Offenburg University: | Bibliografie | Formale Angaben |
| Open Access: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |