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Role of metal electrodes in the generation of third order nonlinearities in TC-SAW devices

  • In the present work, nonlinearities in temperature compensating (TC) SAW devices are investigated. The materials used are LiNbO3-rot128YX as the substrate and Copper electrodes covered with a SiO2-layer as the compensating layer. In order to understand the role of these materials for the nonlinearities in such acoustic devices, a FEM simulation model in combination with a perturbationIn the present work, nonlinearities in temperature compensating (TC) SAW devices are investigated. The materials used are LiNbO3-rot128YX as the substrate and Copper electrodes covered with a SiO2-layer as the compensating layer. In order to understand the role of these materials for the nonlinearities in such acoustic devices, a FEM simulation model in combination with a perturbation approach [1] is applied. The nonlinear tensor data of the different materials involved in TC-SAW devices have been taken from literature, but were partially modified to fit experimental data by introducing scaling factors. An effective nonlinearity constant is determined by comparison of nonlinear P-matrix simulations to IMD3 measurements of test filters. By employing these constants in nonlinear periodic P-matrix simulations a direct comparison to nonlinear periodic FEM-simulations yields the scaling factors for the material used. Thus, the contribution of different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of metal electrodes is discussed in detail‚Ķshow moreshow less

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Metadaten
Author:Vikrant Chauhan, Andreas P. Mayer, Elena Mayer, Werner Ruile, Thomas Ebner
Publisher:IEEE
Place of publication:Washington
Year of Publication:2017
Pagenumber:1
Language:English
Parent Title (German):2017 IEEE International Ultrasonics Symposium (IUS)
First Page:1
Last Page:1
Document Type:Other
Institutes:Hochschule Offenburg / Bibliografie
Acces Right:Zugriffsbeschränkt
Release Date:2018/01/18
Licence (German):License LogoEs gilt das UrhG
URN:urn:nbn:de:bsz:ofb1-opus4-26656
DOI:https://doi.org/10.1109/ULTSYM.2017.8092066